System Introduction

The Chemical Monitoring System (CMS) is the core of the semiconductor/panel plant system. It is responsible for real-time monitoring, alarming, and linkage control of chemical delivery, concentration, pressure, temperature, leakage, and flow to ensure process stability, personnel safety, and environmental compliance.

Location: Covering the entire process from CDS (Central Chemicals Supply) to CMD (Distribution Cabinet) to secondary dispensing to machine operation.

System Function Introduction

1. Real-time online monitoring continuously monitors key parameters such as chemical concentration, gas, temperature, pressure, pH, and liquid level 24 hours a day.

2. Multi-level intelligent alarm: Automatic sound and light/SMS/APP alarm when exceeding the standard, supporting early warning, alarm, and emergency linkage response.

3. Data Acquisition and Storage: Automatically collects and stores historical data for long periods, supporting trend curve viewing and tracing.

4. Automatic reporting and compliance: Generates daily and monthly monitoring reports and alarm records to meet environmental protection, safety, and system audit requirements.

5. Remote monitoring and management: View remotely via computer/mobile phone, supporting centralized monitoring and real-time status synchronization across multiple terminals.

6. Safety linkage control is linked with equipment such as exhaust, shut-off valves, and sprinklers, and automatically executes safety actions in case of abnormalities.

7. Leakage and Anomaly Location: Quickly identify risks such as leaks, overheating, and overpressure, and locate abnormal points.

Design Cases