From the Central Chemical Supply System (CDS)/Chemical Dispenser (CMD) to end-point precision delivery lines (IPLs) between the central chemical supply system (CDS) and end-point process equipment (such as CMP, etching, and diffusion equipment), these lines are responsible for safely, impurity-free, and unmixed delivery of high-purity/corrosive chemicals to the point of use (POU).
l Check the UM/UT equipment interface table to confirm that the diameter, pressure, and flow rate are consistent with the design.
l Material arrival verification: material certificate, cleanliness report, and seal compatibility certificate.
2. Construction process control
l Cleanroom construction: Secondary prefabrication is completed in a cleanroom and then sealed and moved into the clean area; construction tools are dedicated and free of oil stains.
l Welding and Connection：
l Stainless steel pipe: fully automatic track argon arc welding, argon protection, no oxidation color.
l PFA pipe: hot-melt butt welding, smooth weld without steps, avoiding bubbles/slag inclusions.
l Anti-static and anti-pollution measures: PTFE insulating pads are added between stainless steel pipes and carbon steel supports; sleeves are installed when pipes penetrate floors/walls, and the gaps are filled with non-combustible materials.
l Slope design: The pipeline maintains a slope of ≥1% to ensure self-draining and eliminate any dead corners.
Design Cases
Focus on semiconductor gas and chemical delivery systems
An international enterprise specializing in plant management and technical solutions
