Main System Introduction

The high-voltage main power supply system, which draws power from the high-voltage power grid/external substation, is stepped down and distributed by the main substation in the plant area, and then transmitted to the substations in each plant, is the source and backbone of the semiconductor factory's power supply.

·  High reliability requires N+1 or 2N redundancy to avoid wafer scrapping due to instantaneous power failure.

·  High stability, low voltage fluctuation, low harmonics, and no frequent tripping.

·  High-safety features include fire protection, explosion protection, and insulation monitoring, conforming to NFPA/IEC standards.

·  It has the potential to be expanded by reserving bus bay and transformer capacity to accommodate future process upgrades.

In the implementation of power systems, we need to consider the significant impact of power disturbances on the owner's factory costs, process efficiency, and yield. Therefore, a reliable and flexible power supply is one of the factory's differentiating advantages.

Design Cases